Surface Analysis
Scanning Electron Microscope (SEM) / Energy Dispersive X-ray analysis (EDX) / Electron Probe MicroAnalyzer (EPMA)
| Schottky Field Emission Scanning Electron Microscope JEOL JSM-7800F | Chitose Institute of Science and Technology | |
|---|---|---|
| Scanning Electron Microscope (SEM) / Energy Dispersive X-ray analysis (EDX) Hitachi S-3500N | Accelerating voltage : 0.5-30 kV Magnification : 15 to 200,000x EDX : EMAX7000 by Horiba Measuring object : B(boron) – U(uranium) Resolution : 144eV | Chitose Institute of Science and Technology |
| Scanning Electron Microscope (SEM) KEYENCE VE-8800 | Chitose Institute of Science and Technology | |
| Hitachi High-Technologies Miniscope TM3000 | NIMS | |
| High resolution Scanning Electron Microscope ･ SEM Hitachi High-Technologies S-5200 | Maximum resolution 0.5nm Components analysis with EDS (Energy Dispersion Spectroscopy) | Japan Advanced Institute of Science and Technology |
| Electron Probe Microanalyzer (EPMA) JEOL JXA-8900L | Analysis chemical range B-U X-ray spectrum range 0.087-9.3nm | Japan Advanced Institute of Science and Technology |
| Field emission scanning electron microscope（FE-SEM） Hitachi SU8000 | Accelerating voltage : 0.5–30 kV Magnification : Low magnification mode 20 to 2,000x High magnification mode 100 to 800,000x Analytical function : EDX | Shinshu University |
| Scanning Electron Microscope (SEM) JEOL, JSM-7500F | Nagoya University | |
| Specialized Scanning Electron Microscope JEOL-JSM5600＋specialized specimen stage | Piezo driven probe, electrical and mechanical properties measurement, on demand joule heating | Nagoya Institute of Technology |
| Scanning Electron Microscope (SEM) JEOL JSM-6700F | Specimens up to 4 inches, with EDS | Institute for Molecular Science |
| Analytical Variable Pressure Scanning Electron Microscope (SEM) Hitach High-Technologies SU6600F | Institute for Molecular Science | |
| Hitach High-Technologies SU9000 | Osaka University | |
| Hitach High-Technologies SU9000 | Kyushu University | |
| 3D SEM Image Measuring Analysis System KEYENCE VE-9800 | Accelerating voltage 0.5-20kV | Kyushu University |
| Scanning Electron Microscope (SEM) Hitachi S-5000 | Magnification : 20 to 1,000,000x | Kyushu University |
Electron Spectroscopy(XPS/UPS/AES)
| Surface analyzer Riken Keiki AC-1 | Energy scanning range : 3.40 – 6.20eV | Chitose Institute of Science and Technology |
|---|---|---|
| Photoelectron Spectrophotometer in Air Riken Keiki AC-3 | Tohoku university | |
| X-ray photoelectron spectrometer (XPS) Shimadzu – AXIS-ULTRA DLD | Japan Advanced Institute of Science and Technology | |
| X-ray photoelectron spectrometer(XPS) Fisons Instruments S-probeTM | Minimum probe 100μm Measurable elements : Li to U | Japan Advanced Institute of Science and Technology |
| Ultraviolet Photoelectron Spectrometer (UPS) Rieken Keiki AC-2 | Capable of measuring the ionized energy of specimens in the atmosphere | Japan Advanced Institute of Science and Technology |
| Techscience PYS-200+IPES | Japan Advanced Institute of Science and Technology | |
| Electron Spectroscopy for Chemical Analysis (ESCA) Shimadzu AXIS-ULTRA DLD | Shinshu University | |
| Band structure microscopic analysis system | Institute for Molecular Science | |
| X-ray Photoelectron Spectrometer (XPS) Omicron EA-125 | Twin Anode X-ray source | Institute for Molecular Science |
| X-ray Photoelectron Spectroscopy ULVAC-PHI ESCA 5800 | Minimum analytical range : φ75μmm Resolution : 0.48 eV Special charge neutralizer function built-in | Kyushu University |
| Scanning Auger Electron Spectroscopy microscope ULVAC-PHI SAM679Xi | Elemental analysis : for atomic number 3 or above Scanning electron beam diameter : Less than 15 nm (accelerating voltage : 12 kV, current 1nA) Energy analysis : 0 to 3200 eV | Japan Advanced Institute of Science and Technology |
Other surface analysis
| Contact Angle Meter Kyowa Interface Science DM-501 | Chitose Institute of Science and Technology | |
|---|---|---|
| Contact Angle Analysis Equipment AST products VCA optima XE | NIMS | |
| Contact angle meter Kyowa Interface Science DM-501 | Nagoya University | |
| Surface analysis equipment for low energy ion scattering spectroscopy Shimadzu | Substrate diameter: 2 inches or less, measurement is possible from Atomic mass of C or larger, Analyzing depth: 10 nm from the outermost surface, Evaluation for fabricated surface (capable on strained surface) | Nagoya Institute of Technology |
