課題番号 ：S-15-NM-0071
利用形態 ：機器利用
利用課題名（日本語） ：
ProgramTitle(English) ：MoS2 Based FET for Bio-related Applications
利用者名（日本語） ：
Username(English) ：Tao Liang
所属名（日本語）：
Affiliation (English) ：Zhejiang University

１．概要（Summary ）
Two-dimensional MoS2 shows great promise for bio-related detection applications owing to its unique properties. We have successfully synthesized MoS2 layers on SiO2(300nm)/Si substrates. In this work, we aims to fabricate MoS2 based field-effect transistor and test its response to biomolecules, towards the goal of untra-sensitive and specific biodetection.
２．実験（Experimental）
a) E-beam lithography (DL-1000, locating, photoresist spin-coating, lithography et al).
b) Development.
c) Metal electrodes deposition (RDEB-1206K, E-beam evaporation or thermal evaporation).
d) Lift-off.
e) I-V characterizations.
f) Thermal annealing and repeated I-V characterizations (QHC-P410).
３．結果と考察（Results and Discussion）
The devices break down due to the electrodes floating in the lift-off solution. So more devices fabrication and characterization should be carried out.

The Au electrodes and the MoS2 layer are not in good contact after the fabrication process, so a relatively large barrier exists between the interfaces, which makes it impossible to obtain the desired I-V curve.
A good contact between the electrode and the sample is necessary to get the desired results. The devices failure here is mainly from the rough surface of the sample, thus the first step to improve the results is to get more impurity-free and surface-flat sample, as referenced below and also the attached paper.

H. S. Philip Wong et al. Synthesis of Large-Area Highly Crystalline Monolayer Molybdenum Disulfide with Tunable Grain Size in a H2 Atmosphere. ACS Appl. Mater. Interfaces 2015, 7, 22587−22593.

４．その他・特記事項（Others）
No

５．論文・学会発表（Publication/Presentation）
No

６．関連特許（Patent）