課題番号 ：S-18-NI-0021
利用形態 ：共同研究
利用課題名（日本語） ：ナノカーボンの低温合成と評価
Program Title (English) ：Low-temperature synthesis and characterization of nanocarbon
利用者名（日本語） ：Mohd　Zamri　Bin　Mohd　Yusop 1)
Username (English) ：Mohd　Zamri　Bin　Mohd　Yusop 1)
所属名（日本語） ：1) マレーシア工科大学
Affiliation (English) ：1) Universiti Teknologi Malaysia (UTM)

１．概要（Summary ）
In this research project, an innovative method of graphene growth was introduced by CVD method and was focused on new materials as precursor to synthesize graphene at ultra-low temperature (100 oC – 400 oC).
２．実験（Experimental）
Metal was coated on quartz/silicon substrates by a simple plasma coating method using ULVAC KIKO quick coater machine model VPS-020. Graphene was synthesizing on the metal catalyst via CVD method in split-horizontal tube reactor furnace by benzene as precursor source. In this study the growth temperature was varied from 100 to 400 oC. Then, the liquid source of precursor that acts as the carbon source in the formation of graphene was released along the CVD flow system at room temperature. Graphene was characterized by Optical Microscope KEYENCE-V1000 (Nagoya Institute of Technology; NITech), Electron Back Scattered Diffraction JEOL JSM-IT300LV (UTM), Transmission Electron Microscope ARM-200F (NITech), Raman Spectrometer (NITech, and UV-Visible Spectrophotometer LAMBDA 1050 UV-VIS/NIR (UTM) and 4-point probe system (MIMOS Bhd.)
３．結果と考察（Results and Discussion）
Figure 1 shows optical images of the low temperature grown graphene on Cu substrates at 150 and 300 oC. The inset shows the Raman spectra and mapping of the respective samples.
The Raman spectra results indicated that both graphene grown at 150 oC and 300 oC have bilayers properties. However, the optical image shows that both graphene domains were very small which confirmed by the Raman mapping results. Further optimization on the growth parameters will be carried out.

Figure 1: Optical images of graphene grown on Cu substrates at 150 and 300 oC.
４．その他・特記事項（Others）
The researcher team would like to express their appreciation for the support of the sponsors from UTM Zamalah Scholarship, GUP Tier 1 grant (Q.J130000.2524.16H37), Transdisciplinary Research Grant (Q.J130000.3551.06G92) and Ministry of Higher Education Malaysia (MOHE).
５．論文・学会発表（Publication/Presentation）
(1) Mohd ‘Azizir-Rahim Mukri, Mohd Syafiq Elias, Madzlan Aziz, Masaki Tanemura, Mohd Zamri Mohd Yusop, AMST, VOL 22, 1 (2018), p.p. 31-41
(2) M. ‘Azizir-Rahim, M. Zamri , M. H. D. Othman, Mona Ibrahim and M. Tanemura, IJAME, (under review)
(3) Mohd ‘Azizir-Rahim Mukri, Madzlan Aziz, Mohd Hafiz Dzarfan Othman, Ahmad Fauzi Ismail and Mohd Zamri Yusop, National Congress on Membrane Technology (NATCOM 2018), 30 October 2018.
６．関連特許（Patent）
None