利用報告書
Effects of Microwave Annealing on the Recovery of Microscopic Defects in Dielectric Films
Effects of Microwave Annealing on the Recovery of Microscopic Defects in Dielectric Films
Institutes
- Chitose Institute of Science and Technology
- Tohoku University
- National Institute for Materials Science
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- Institute for Molecular Science
- Nagoya University
- Nagoya Institute of Technology
- Japan Advanced Institute of Science and Technology
- Nara Institute of Science and Technology
- Osaka University
- Kyushu University
- Nanotech Japan
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Molecule and Material Synthesis Platform
National Institutes of Natural Sciences Institute for Molecular Science
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