Evaluation of Secondary Electron Images and Damages of Organic Under-layer Materials Using Helium / Neon Ion Microscope

Institutes

• Chitose Institute of Science and Technology
• Tohoku University
• National Institute for Materials Science
• Shinshu University
• Institute for Molecular Science
• Nagoya University
• Nagoya Institute of Technology
• Japan Advanced Institute of Science and Technology
• Nara Institute of Science and Technology
• Osaka University
• Kyushu University
• Nanotech Japan
• Microstructural Characterization Platform
• Nanofabrication Platform