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Development of Production and Evaluation Technologies of Silicon Compounds and Their Thin Films
Katsuyoshi Harada
Nagoya University, Institute of Materials and Systems for Sustainability
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Development of Production and Evaluation Technologies of Silicon Compounds and Their Thin Films
Institutes
Chitose Institute of Science and Technology
Tohoku University
National Institute for Materials Science
Shinshu University
Institute for Molecular Science
Nagoya University
Nagoya Institute of Technology
Japan Advanced Institute of Science and Technology
Nara Institute of Science and Technology
Osaka University
Kyushu University
Nanotech Japan
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