利用報告書
Characterization of plasma-induced defect structures in dielectric films
Characterization of plasma-induced defect structures in dielectric films
Institutes
- Chitose Institute of Science and Technology
- Tohoku University
- National Institute for Materials Science
- Shinshu University
- Institute for Molecular Science
- Nagoya University
- Nagoya Institute of Technology
- Japan Advanced Institute of Science and Technology
- Nara Institute of Science and Technology
- Osaka University
- Kyushu University
- Nanotech Japan
- Microstructural Characterization Platform
- Nanofabrication Platform
Molecule and Material Synthesis Platform
National Institutes of Natural Sciences Institute for Molecular Science
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